Jaeger, Richard C.
Introduction to microelectronic fabrication Richard C. Jaeger. - 1st ed. - New York Addison-Wesley Pub. Co. 1988 - xiii, 232 p. ill. 24 cm. - Modular series on solid state devices .
Volume V
Includes bibliographies
0201146959
Integrated circuits
623.8173 / JAE/1988
Introduction to microelectronic fabrication Richard C. Jaeger. - 1st ed. - New York Addison-Wesley Pub. Co. 1988 - xiii, 232 p. ill. 24 cm. - Modular series on solid state devices .
Volume V
Includes bibliographies
0201146959
Integrated circuits
623.8173 / JAE/1988