Marcus, R. B.
Transmission electron microscopy of silicon VLSI circuits and structures - 1st ed. - New York John Wiley & Sons 1983 - x, 217p. ill. 29 cm.
Includes bibliographies
0471092517
Integrated circuits
623.8173 / MAR/1983
Transmission electron microscopy of silicon VLSI circuits and structures - 1st ed. - New York John Wiley & Sons 1983 - x, 217p. ill. 29 cm.
Includes bibliographies
0471092517
Integrated circuits
623.8173 / MAR/1983