Burger, R. M.

Fundamentals of silicon integrated device technology - 1st ed. - Englewood Cliffs Prentice-Hall 1967 - xiv, 495 p. illus. 24 cm. - Solid state physical electronics series .

Vol. 1 (oxidation, diffusion and expitaxy)

Includes bibliographies


Silicon : Micro muniature circuits : Solid state

539.2041 / BUR/1967