Costello, Suzanne.

Hermeticity testing of MEMS and microelectronic packages / by Suzanne Costello, Marc P.Y. Desmulliez. - Ist ed. - Boston : Artech House, 2013. - 195 p. : ill. ; 24 cm. - Integrated microsystems series .

Includes bibliographies.

9781608075270


Microelectronics.

623.817 / COS/2013