Irene, Eugene A.
Surfaces, interfaces, and thin films for microelectronics - 1st ed. - Hoboken Wiley-Interscience 2008 - xiii, 515 p. ill. 25 cm.
Includes bibliographies
9780470174470 0470174471
Surface chemistry
Interfaces (Physical sciences)
Microelectronics
541.3453 / IRE/2008
Surfaces, interfaces, and thin films for microelectronics - 1st ed. - Hoboken Wiley-Interscience 2008 - xiii, 515 p. ill. 25 cm.
Includes bibliographies
9780470174470 0470174471
Surface chemistry
Interfaces (Physical sciences)
Microelectronics
541.3453 / IRE/2008