Gentili, M.
Nanolithography a borderland between STM, EB, IB, and X-ray lithographies - 1st ed. - Boston Kluwer Academic Publishers 1993 - xii, 215 p. ill. 25 cm. - NATO ASI series, Vol. 264 .
Includes bibliographies
0792327942
Molecular electronics
623.36 / GEN/1993
Nanolithography a borderland between STM, EB, IB, and X-ray lithographies - 1st ed. - Boston Kluwer Academic Publishers 1993 - xii, 215 p. ill. 25 cm. - NATO ASI series, Vol. 264 .
Includes bibliographies
0792327942
Molecular electronics
623.36 / GEN/1993