Gad-el-Hak, Mohamed

MEMS introduction and fundamentals - 2nd ed. - Boca Raton CRC/Taylor & Francis 2006 - 1 v. (various pagings) ill. 26 cm. - Mechanical engineering series .

Includes bibliographies

0849391377 0849321069


Microelectromechanical systems

623.817 / GAD/2006