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Harashima, Fumio

Integrated micro-motion systems micromachining, control, and applications - 1st ed. - Amsterdam Elsevier 1990 - xii, 462 p. ill. 25 cm.

Includes bibliographies

ISBN: 0444884173

Subjects--Topical Terms:
Micromachining

Dewey Class. No.: 623.817 / HAR/1990

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