Konuma, Mitsuharu
Plasma techniques for film deposition - 1st ed. - Harrow Alpha Science International 2005 - ix, 337 p. ill. 25 cm.
Includes bibliographies3) and index.
184265151X
Plasma-enhanced chemical vapor deposition
623.8152 / KON/2005
Plasma techniques for film deposition - 1st ed. - Harrow Alpha Science International 2005 - ix, 337 p. ill. 25 cm.
Includes bibliographies3) and index.
184265151X
Plasma-enhanced chemical vapor deposition
623.8152 / KON/2005