Setter, Nava
Electroceramic-based MEMS fabrication-technology and applications - 1st ed. - New York Springer Science+Business Media 2010 - xii, 414 p. ill. 25 cm. - Electronic materials: science & technology .
Includes bibliographies
9781441936042
Microelectromechanical systems
623.81 / SET/2010
Electroceramic-based MEMS fabrication-technology and applications - 1st ed. - New York Springer Science+Business Media 2010 - xii, 414 p. ill. 25 cm. - Electronic materials: science & technology .
Includes bibliographies
9781441936042
Microelectromechanical systems
623.81 / SET/2010