Gad-el-Hak, Mohamed
MEMS design and fabrication - 2nd ed. - Boca Raton CRC/Taylor & Francis 2006 - various pagings ill. 26 cm. - Mechanical engineering series The MEMS handbook .
Includes bibliographies
0849391385 0849321069
Microelectromechanical systems
Microfabrication
623.81 / GAD/2006
MEMS design and fabrication - 2nd ed. - Boca Raton CRC/Taylor & Francis 2006 - various pagings ill. 26 cm. - Mechanical engineering series The MEMS handbook .
Includes bibliographies
0849391385 0849321069
Microelectromechanical systems
Microfabrication
623.81 / GAD/2006