Senturia, Stephen D.
Microsystem design - 1st ed. - New York Springer 2001 - xxvi, 689 p. ill. 24 cm.
Includes bibliographies
0792372468
Microelectromechanical systems
623.81 / SEN/2001
Microsystem design - 1st ed. - New York Springer 2001 - xxvi, 689 p. ill. 24 cm.
Includes bibliographies
0792372468
Microelectromechanical systems
623.81 / SEN/2001