Brodie, Ivor
Physics of micro/nano-fabrication - 1st ed. - New York Plenum Press 1992 - xix, 650p. ill. - Microdevices physics and fabrication technologies .
Includes bibliographies
0306441462
Microelectronics
623.81 / BRO/1992
Physics of micro/nano-fabrication - 1st ed. - New York Plenum Press 1992 - xix, 650p. ill. - Microdevices physics and fabrication technologies .
Includes bibliographies
0306441462
Microelectronics
623.81 / BRO/1992