Lyshevski, Sergey Edward

Nano- and micro-electromechanical systems fundamentals of nano- and microengineering by Sergey Edward Lyshevski - 2nd ed. - Boca Raton CRC Press 2005 - 722 p. ill. 26 cm.

Includes bibliographies

0849328381


Microelectromechanical systems
Nanotechnology

623.815 / LYS/2005