Lyshevski, Sergey Edward
Nano- and micro-electromechanical systems fundamentals of nano- and microengineering by Sergey Edward Lyshevski - 2nd ed. - Boca Raton CRC Press 2005 - 722 p. ill. 26 cm.
Includes bibliographies
0849328381
Microelectromechanical systems
Nanotechnology
623.815 / LYS/2005
Nano- and micro-electromechanical systems fundamentals of nano- and microengineering by Sergey Edward Lyshevski - 2nd ed. - Boca Raton CRC Press 2005 - 722 p. ill. 26 cm.
Includes bibliographies
0849328381
Microelectromechanical systems
Nanotechnology
623.815 / LYS/2005