Electroceramic-based MEMS : fabrication-technology and applications /
edited by Nava Setter.
- New York : Springer Science+Business Media, 2005.
- xii, 414 p. : ill. ; 25 cm.
- The Kluwer international series in: Electronic materials: science and technology ; .
Includes bibliographies.
0387233105
Microelectromechanical systems.
623081 / SET/2005
Includes bibliographies.
0387233105
Microelectromechanical systems.
623081 / SET/2005