Madou, Marc J.
Fundamentals of microfabrication and nanotechnology - 3rd ed. - Boca Raton Taylor & Francis 2012 - xiii, 641 p.
Volume I
Solid-state physics, fluidics, and analyticial techniques in micro-and nanotechnology
Includes bibliographies
9781420055115
Fundamentals of microfabrication and nanotechnology - 3rd ed. - Boca Raton Taylor & Francis 2012 - xiii, 641 p.
Volume I
Solid-state physics, fluidics, and analyticial techniques in micro-and nanotechnology
Includes bibliographies
9781420055115