Madou, Marc J.
Fundamentals of microfabrication and nanotechnology - 3rd ed. - Boca Raton Taylor & Francis 2012 - xiii, 636p.
Volume III
From MEMS to Bio-MEMS and Bio-NEMS :manufacturing techniques and applications
Includes bibliographies
9781420055160
Fundamentals of microfabrication and nanotechnology - 3rd ed. - Boca Raton Taylor & Francis 2012 - xiii, 636p.
Volume III
From MEMS to Bio-MEMS and Bio-NEMS :manufacturing techniques and applications
Includes bibliographies
9781420055160