Adams, Thomas M.
Introductory MEMS : fabrication and applications / by Thomas M. Adams, Richard A. Layton. - Ist ed. - New York : Springer, 2010. - xv, 444 p. : ill. (some col.) ; 25 cm.
Includes bibliographies.
9780387095103
Microelectromechanical systems.
623.81/ / ADA/2010
Introductory MEMS : fabrication and applications / by Thomas M. Adams, Richard A. Layton. - Ist ed. - New York : Springer, 2010. - xv, 444 p. : ill. (some col.) ; 25 cm.
Includes bibliographies.
9780387095103
Microelectromechanical systems.
623.81/ / ADA/2010