000 -LEADER |
fixed length control field |
00480nam a22001817a 4500 |
001 - CONTROL NUMBER |
control field |
11154 |
003 - CONTROL NUMBER IDENTIFIER |
control field |
BD-DhUET |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
150214b xxu||||| |||| 00| 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
0070193045 |
040 ## - CATALOGING SOURCE |
Original cataloging agency |
DLC |
Transcribing agency |
DLC |
Modifying agency |
BD-DhUET |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
623.8173 |
Item number |
ELL/1986 |
100 ## - MAIN ENTRY--PERSONAL NAME |
Personal name |
Elliott, David J. |
245 ## - TITLE STATEMENT |
Title |
Microlithography: Process technology for IC fabrication |
250 ## - EDITION STATEMENT |
Edition statement |
Ist ed. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
Place of publication, distribution, etc. |
New York |
Name of publisher, distributor, etc. |
Mcgraw Hill |
Date of publication, distribution, etc. |
1986 |
300 ## - PHYSICAL DESCRIPTION |
Extent |
xix, 378p. |
Other physical details |
col. illus. |
942 ## - ADDED ENTRY ELEMENTS (KOHA) |
Koha item type |
General Book |