| 000 -LEADER |
|---|
| fixed length control field |
00619nam a2200217 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
40336 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
BD-DhUET |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
061219s2008 flua bf 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
1574446754 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
DLC |
| Transcribing agency |
DLC |
| Modifying agency |
BD-DhUET |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
623.815202 |
| Item number |
DOE/2008 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Doering, Robert |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Handbook of semiconductor manufacturing technology |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc. |
London |
| Name of publisher, distributor, etc. |
Taylor & Francis |
| Date of publication, distribution, etc. |
2008 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
Various pagings |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographies |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Semiconductors-Design and construction-Handbooks, manuals, etc. |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Nishi, Yoshio |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Edited Book |