Physics of submicron lithography
by Valiev, Kamil A.
Series: Microdevices.Publisher: New York Plenum Press 1992Edition: 1st ed.Description: xi, 493 p. ill. 26 cm.ISBN: 0306435780.Subject(s): Lithography, Electron beam| Item type | Current location | Call number | Copy number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
| General Book | Central Library, BUET Reading section | 537.622/VAL/1992 (Browse shelf) | 1 | Available | 89337 |
Includes bibliographies
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