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Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions

by Rossnagel, Stephen M; Cuomo, Jerome J; Westwood, William D.
Series: Materials science and process technology series.Publisher: New York Noyes Publications 1990Edition: 1st ed.Description: xxiii, 523 p. ill. 25 cm.ISBN: 0815512201 .Subject(s): Plasma engineeringOnline resources: Click here to access online
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Item type Current location Call number Copy number Status Date due Barcode
Edited Book Central Library, BUET
Reading section
621.04402/ROS/1990 (Browse shelf) 1 Available 97238

Includes bibliographies

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