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Plasma techniques for film deposition

by Konuma, Mitsuharu.
Publisher: Harrow Alpha Science International 2005Edition: 1st ed.Description: ix, 337 p. ill. 25 cm.ISBN: 184265151X.Subject(s): Plasma-enhanced chemical vapor deposition
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Item type Current location Call number Copy number Status Date due Barcode
General Book Central Library, BUET
Reading section
623.8152 /ON/2005 (Browse shelf) 1 Available 104450

Includes bibliographies3) and index.

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