Plasma techniques for film deposition
by Konuma, Mitsuharu.
Publisher: Harrow Alpha Science International 2005Edition: 1st ed.Description: ix, 337 p. ill. 25 cm.ISBN: 184265151X.Subject(s): Plasma-enhanced chemical vapor depositionItem type | Current location | Call number | Copy number | Status | Date due | Barcode |
---|---|---|---|---|---|---|
General Book | Central Library, BUET Reading section | 623.8152 /ON/2005 (Browse shelf) | 1 | Available | 104450 |
Includes bibliographies3) and index.
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