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Physics of micro/nano-fabrication

by Brodie, Ivor; Muray, Julius J.
Series: Micro devices physics and fraction.Publisher: New York Plenum Press 1992Edition: 1st ed.Description: xix, 650 p. ill. 26 cm.ISBN: 0306441462.Subject(s): MicroelectronicsOnline resources: Click here to access online | Click here to access online
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Item type Current location Call number Copy number Status Date due Barcode
General Book Central Library, BUET
Reading section 		623.81/BRO/1992 (Browse shelf) 1 Available 89334

Includes bibliographies

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