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Applications of plasma processes to VLSI technology

by Sugano, Takuo.
Publisher: New York John Wiley & Sons 1985Edition: Ist ed.Description: xiv, 394 p. ill. 24 cm.ISBN: 0471869600.Subject(s): Semiconductors | Integrated circuits
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Item type Current location Call number Copy number Status Date due Barcode
Edited Book Central Library, BUET
Circulation section
623.8173/APP/1985 (Browse shelf) 1 Available 75665

Includes bibliographies

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