TY - BOOK AU - Pelesko, John A. AU - Bernstein, David H. TI - Modeling MEMS and NEMS SN - 1584883065 U1 - 511.8 PY - 2003/// CY - Boca Raton, FL PB - Chapman & Hall/CRC KW - Microelectromechanical systems N1 - Includes bibliographies UR - http://www.loc.gov/catdir/enhancements/fy0646/2002031599-d.html ER -