00559nam a2200205 i 4500
29046
BD-DhUET
800514s1980 nyua b 001 0 eng
047107828X
DLC
DLC
BD-DhUET
537.52
CHA/1980
Chapman, Brian
Glow discharge processes
sputtering and plasma etching
1st ed.
New York
John Wiley & Sons
1980
xv,406p.
ill.
24 cm.
Includes bibliographies
Sputtering (Physics)
GB
29046
29046
0
0
ddc
0
537_520000000000000_CHA_1980
0
53744
BCL
BCL
RD
2015-06-15
537.52/CHA/1980
90803
2015-06-15
1
2015-06-15
GB
0
0
ddc
0
537_520000000000000_CHA_1980
0
53745
BCL
BCL
RD
2015-06-15
537.52/CHA/1980
90802
2015-06-15
2
2015-06-15
GB