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1. Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions

by Rossnagel, Stephen M; Cuomo, J. J; Westwood, William D.

Edition: Ist ed.Publisher: Park Ridge, N.J., U.S.A. : Noyes Publications, 1990Online Access: Click here to access online Availability: Items available for loan: Central Library, BUET [621.04402/ROS/1990] (1).

2. Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions

by Rossnagel, Stephen M; Cuomo, Jerome J; Westwood, William D.

Edition: 1st ed.Publisher: New York Noyes Publications 1990Online Access: Click here to access online Availability: Items available for loan: Central Library, BUET [621.04402/ROS/1990] (1).

3. Industrial plasma engineering

by Roth, J. Reece.

Edition: 1st ed.Publisher: Bristol Institute of Physics Publishing 1995Online Access: Click here to access online Availability: Items available for loan: Central Library, BUET [621.044 ROT/1995] (2).