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MEMS design and fabrication

by Gad-el-Hak, Mohamed.
Series: The MEMS handbook.Publisher: Boca Raton CRC/Taylor & Francis 2006Edition: 2nd ed.Description: various pagings ill. 26 cm.ISBN: 0849391385; 0849321069.Subject(s): Microelectromechanical systems | Microfabrication
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Item type Current location Call number Copy number Status Date due Barcode
Edited Book Central Library, BUET
Reading section 		623.81/GAD/2006 (Browse shelf) 1 Available 104828

Includes bibliographies

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