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Fine line lithography

by Newman, Roger.
Publisher: New York North-Holland Publishing 1980Edition: 1st ed.Description: vii, 481 p. 23 cm.ISBN: 0444853510.Subject(s): Integrated circuits large scale-integration
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Item type Current location Call number Copy number Status Date due Barcode
Edited Book Central Library, BUET
Circulation section
623.8173/NEW/1980 (Browse shelf) 1 Available 60174

Volume I

Includes bibliographies

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