| 000 | 00541nam a2200193 a 4500 | ||
|---|---|---|---|
| 001 | 10539 | ||
| 003 | BD-DhUET | ||
| 008 | 820720s1983 nyua 001 0 eng | ||
| 020 | _a0126747806 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a621.55 _bSTU/1983 |
||
| 100 | 1 | _aStuart, R. V. | |
| 245 | 1 | 0 |
_aVacuum technology, thin films, and sputtering _ban introduction _cby R. V. Stuart |
| 250 | _a1st ed. | ||
| 260 |
_aNew York _bAcademic Press _c1983 |
||
| 300 |
_aviii, 151 p. _bill. _c24 cm. |
||
| 650 | 0 | _aVacuum technology | |
| 942 | _cGB | ||
| 999 |
_c10539 _d10539 |
||