000 00583nam a2200217 a 4500
001 10540
003 BD-DhUET
008 921022s1993 enka b 001 0 eng
020 _a0412465906
040 _aDLC
_cDLC
_dBD-DhUET
082 _a621.55
_bDEL/1993
100 1 _aDelchar, T. A.
245 1 0 _aVacuum physics and techniques
_cby T. A. Delchar
250 _a1st ed.
260 _aNew York
_bChapman & Hall
_c1993
300 _aviii, 253 p.
_bill.
_c22 cm.
490 _aPhysics and its application
504 _aIncludes bibliographies
650 0 _aVacuum
942 _cGB
999 _c10540
_d10540