| 000 | 00480nam a22001817a 4500 | ||
|---|---|---|---|
| 001 | 11154 | ||
| 003 | BD-DhUET | ||
| 008 | 150214b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a 0070193045 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a623.8173 _bELL/1986 |
||
| 100 | _a Elliott, David J. | ||
| 245 | _aMicrolithography: Process technology for IC fabrication | ||
| 250 | _aIst ed. | ||
| 260 |
_aNew York _bMcgraw Hill _c1986 |
||
| 300 |
_a xix, 378p. _bcol. illus. |
||
| 942 | _cGB | ||
| 999 |
_c11154 _d11154 |
||