| 000 | 00604nam a2200217 a 4500 | ||
|---|---|---|---|
| 001 | 11319 | ||
| 003 | BD-DhUET | ||
| 008 | 830224s1983 nyua b 001 0 eng | ||
| 020 | _a0471092517 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a623.8173 _bMAR/1983 |
||
| 100 | 1 | _aMarcus, R. B. | |
| 245 | 1 | 0 | _aTransmission electron microscopy of silicon VLSI circuits and structures |
| 250 | _a1st ed. | ||
| 260 |
_aNew York _bJohn Wiley & Sons _c1983 |
||
| 300 |
_ax, 217p. _bill. _c29 cm. |
||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aIntegrated circuits | |
| 700 | 1 | _aSheng, T. T. | |
| 942 | _cGB | ||
| 999 |
_c11319 _d11319 |
||