000 00710nam a22002291 4500
001 13984
003 BD-DhUET
008 730305m19671968njuaf b 000 0 eng
040 _aDLC
_cDLC
_dBD-DhUET
082 _a539.2041
_bBUR/1967
100 1 _aBurger, R. M.
245 1 0 _aFundamentals of silicon integrated device technology
250 _a1st ed.
260 _aEnglewood Cliffs
_c1967
_bPrentice-Hall
300 _axiv, 495 p.
_billus.
_c24 cm.
490 0 _aSolid state physical electronics series
500 _aVol. 1 (oxidation, diffusion and expitaxy)
504 _aIncludes bibliographies
650 0 _aSilicon : Micro muniature circuits : Solid state
700 1 _aDonovan, R. P.
942 _cGB
999 _c13984
_d13984