000 00600nam a22002174a 4500
001 1651
003 BD-DhUET
008 050713s2006 flua b 001 0 eng
020 _a0849391393
040 _aDLC
_cDLC
_dBD-DhUET
082 0 0 _a623.8102
_bGAD/2006
245 0 0 _aMEMS handbook
_bapplications
250 _a2nd ed.
260 _aBoca Raton
_bCRC Press
_c2006
300 _axii,+various paging
490 1 _aMechanical engineering series
504 _aIncludes bibliographies
650 0 _aMicroelectromechanical systems-Handbooks,manuals,etc
700 _aGad-el-Hak, Mohamed
942 _cEB
999 _c1651
_d1651