| 000 | 00844nam a22002294a 4500 | ||
|---|---|---|---|
| 001 | 1806 | ||
| 003 | BD-DhUET | ||
| 008 | 040910s2005 nyua b 001 0 eng | ||
| 020 | _a0387233105 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 | 0 | 0 |
_a623.81 _bSET/2005 |
| 245 | 0 | 0 |
_aElectroceramic-based MEMS: _bfabrication-technology and applications _cedited by Nava Setter. |
| 260 |
_aNew York : _bSpringer Science+Business Media, _c2005. |
||
| 300 |
_axii, 414 p. : _bill. ; _c25 cm. |
||
| 490 | 1 | _aThe Kluwer international series in: Electronic materials: science and technology ; | |
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 700 | 1 | _aSetter, N. | |
| 856 | 4 | 1 | _uhttp://www.loc.gov/catdir/toc/fy0612/2004058924.html |
| 856 | 4 | 2 | _uhttp://www.loc.gov/catdir/enhancements/fy0663/2004058924-d.html |
| 942 | _cEB | ||
| 999 |
_c1806 _d1806 |
||