| 000 | 00728nam a2200217 a 4500 | ||
|---|---|---|---|
| 001 | 19514 | ||
| 003 | BD-DhUET | ||
| 008 | 930312s1993 enka b 001 0 eng d | ||
| 040 |
_aViBlbV _cViBlbV _dBD-DhUET |
||
| 082 |
_a660.28426 _bINT/1987 |
||
| 111 |
_aInternational conference on chemical vapor deposition _cHonolulu _d10/01/1987 _n10th |
||
| 245 | 0 | 0 | _aChemical vapor deposition |
| 260 |
_aNew Jersey _bThe Electrochemical Society _c1987 |
||
| 300 | _axvi,1269p. | ||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aChemical vapor deposition | |
| 700 | _aCullen, G. W. | ||
| 856 | 4 | 2 | _uhttp://www.loc.gov/catdir/description/els032/93125773.html |
| 856 | 4 | 1 | _uhttp://www.loc.gov/catdir/toc/els032/93125773.html |
| 942 | _cPRC | ||
| 999 |
_c19514 _d19514 |
||