000 00566nam a2200193 a 4500
001 19679
003 BD-DhUET
008 991123c19959999gw qr pso 0 a0eng c
040 _aMiKW
_beng
_cMiKW
_dBD-DhUET
050 0 0 _aTA401
082 _a671.735
_bINT/1987
111 _aInternational conference on chemical vapor deposition
_cHonolulu
_d10/01/1987
_n10th
245 1 0 _aChemical vapor deposition
260 _aPennington
_bThe Electrochemical Society
_c1987
300 _axvi,1269p.
650 0 _aChemical vapor deposition
700 _aCullen, G. W.
942 _cPRC
999 _c19679
_d19679