| 000 | 00675nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | 27754 | ||
| 003 | BD-DhUET | ||
| 008 | 070612s2008 njua b 001 0 eng | ||
| 020 | _a9780470174470 | ||
| 020 | _a0470174471 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a541.3453 _bIRE/2008 |
||
| 100 | 1 | _aIrene, Eugene A. | |
| 245 | 1 | 0 | _aSurfaces, interfaces, and thin films for microelectronics |
| 250 | _a1st ed. | ||
| 260 |
_aHoboken _bWiley-Interscience _c2008 |
||
| 300 |
_axiii, 515 p. _bill. _c25 cm. |
||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aSurface chemistry | |
| 650 | 0 | _aInterfaces (Physical sciences) | |
| 650 | 0 | _aMicroelectronics | |
| 942 | _cGB | ||
| 999 |
_c27754 _d27754 |
||