| 000 | 00703nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | 29041 | ||
| 003 | BD-DhUET | ||
| 008 | 930512s2010 maua b 001 0 eng | ||
| 020 | _a9781606501115 | ||
| 020 | _a1606501119 | ||
| 020 | _a9781606501092 | ||
| 020 | _a1606501097 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 | 0 | 0 |
_a620.1 _bSTR/2010 |
| 100 | _aStrausser, Yale | ||
| 245 | 0 | 0 | _aCharacterization in silicon processing |
| 250 | _a1st ed. | ||
| 260 |
_aNew York _bMomentum Press _c2010 |
||
| 300 |
_axiii, 240 p. _bill. _c25 cm. |
||
| 490 | _aMaterials characterization series | ||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aSilicon | |
| 650 | 0 | _aElectric conductors | |
| 942 | _cEB | ||
| 999 |
_c29041 _d29041 |
||