| 000 | 00827nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | 29419 | ||
| 003 | BD-DhUET | ||
| 008 | 890809s1990 njua b 001 0 eng | ||
| 020 | _a0815512201 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 | 0 | 0 |
_a621.04402 _bROS/1990 |
| 100 | _aRossnagel, Stephen M. | ||
| 245 | 0 | 0 |
_aHandbook of plasma processing technology _bfundamentals, etching, deposition, and surface interactions |
| 250 | _a1st ed. | ||
| 260 |
_aNew York _bNoyes Publications _c1990 |
||
| 300 |
_axxiii, 523 p. _bill. _c25 cm |
||
| 490 | _aMaterials science and process technology series | ||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aPlasma engineering | |
| 700 | _aCuomo, Jerome J. | ||
| 700 | 1 | _aWestwood, William D. | |
| 856 | 4 | 2 | _uhttp://www.loc.gov/catdir/description/wap041/89022834.html |
| 942 | _cEB | ||
| 999 |
_c29419 _d29419 |
||