| 000 | 00842nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | 30342 | ||
| 003 | BD-DhUET | ||
| 008 | 940309s1994 ne a b 101 0 eng | ||
| 020 | _a0792327942 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a623.36 _bGEN/1993 |
||
| 100 | _aGentili, M. | ||
| 245 | 1 | 0 |
_aNanolithography _ba borderland between STM, EB, IB, and X-ray lithographies |
| 250 | _a1st ed. | ||
| 260 |
_aBoston _bKluwer Academic Publishers _c1993 |
||
| 300 |
_axii, 215 p. _bill. _c25 cm. |
||
| 490 | _aNATO ASI series, Vol. 264 | ||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aMolecular electronics | |
| 700 | _aGiovannella, C. | ||
| 700 | 1 | _aSelci, S. | |
| 856 | 4 | 2 | _uhttp://www.loc.gov/catdir/enhancements/fy0813/94010205-d.html |
| 856 | 4 | 1 | _uhttp://www.loc.gov/catdir/enhancements/fy0813/94010205-t.html |
| 942 | _cEB | ||
| 999 |
_c30342 _d30342 |
||