| 000 | 00571nam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | 30613 | ||
| 003 | BD-DhUET | ||
| 008 | 900601s1990 ne a b 100 0 eng | ||
| 020 | _a0444884173 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 | 0 | 0 |
_a623.817 _bHAR/1990 |
| 100 | _aHarashima, Fumio | ||
| 245 | 1 | 0 |
_aIntegrated micro-motion systems _bmicromachining, control, and applications |
| 250 | _a1st ed. | ||
| 260 |
_aAmsterdam _bElsevier _c1990 |
||
| 300 |
_axii, 462 p. _bill. _c25 cm. |
||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aMicromachining | |
| 942 | _cEB | ||
| 999 |
_c30613 _d30613 |
||