| 000 | 00698nam a22002534a 4500 | ||
|---|---|---|---|
| 001 | 30744 | ||
| 003 | BD-DhUET | ||
| 008 | 050525s2006 flua b 001 0 eng | ||
| 020 | _a0849391385 | ||
| 020 | _a0849321069 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a623.81 _bGAD/2006 |
||
| 100 | _aGad-el-Hak, Mohamed | ||
| 245 | 0 | 0 |
_aMEMS _bdesign and fabrication |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton _bCRC/Taylor & Francis _c2006 |
||
| 300 |
_avarious pagings _bill. _c26 cm. |
||
| 490 | 1 | _aMechanical engineering series | |
| 490 | 0 | _aThe MEMS handbook | |
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aMicrofabrication | |
| 942 | _cEB | ||
| 999 |
_c30744 _d30744 |
||