| 000 | 00553nam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | 30763 | ||
| 003 | BD-DhUET | ||
| 008 | 940929s1995 maua b 001 0 eng | ||
| 020 | _a0792395344 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 | 0 | 0 |
_a623.815 _bELK/1995 |
| 100 | _aEl-Kareh, Badih | ||
| 245 | 1 | 0 | _aFundamentals of semiconductor processing technologies |
| 250 | _a1st ed. | ||
| 260 |
_aBoston _bKluwer Academic Publishers _c1995 |
||
| 300 |
_axii, 599p. _bill. |
||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aSemiconductors | |
| 942 | _cGB | ||
| 999 |
_c30763 _d30763 |
||