| 000 | 00533nam a22002054a 4500 | ||
|---|---|---|---|
| 001 | 30813 | ||
| 003 | BD-DhUET | ||
| 008 | 000921s2001 maua b 001 0 eng | ||
| 020 | _a0792372468 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 | 0 | 0 |
_a623.81 _bSEN/2001 |
| 100 | _aSenturia, Stephen D. | ||
| 245 | 1 | 0 | _aMicrosystem design |
| 250 | _a1st ed. | ||
| 260 |
_aNew York _bSpringer _c2001 |
||
| 300 |
_axxvi, 689 p. _bill. _c24 cm. |
||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 942 | _cGB | ||
| 999 |
_c30813 _d30813 |
||