000 00536nam a2200193 a 4500
001 30824
003 BD-DhUET
008 931007s1994 nyua b 001 0 eng
020 _a0471580058
040 _aDLC
_cDLC
_dBD-DhUET
082 0 0 _a623.815
_bGHA/1994
100 _aGhandhi, Sorab K.
245 1 0 _aVLSI fabrication principles
_bsilicon and gallium arsenide
_cSorab K. Ghandhi.
250 _a2nd ed.
260 _aNew York
_bWiley
_c1994
300 _axxiv, 834 p.
_bill.
_c25 cm.
650 0 _aIntegrated circuits
942 _cGB
999 _c30824
_d30824