000 00660nam a2200241 a 4500
001 31333
003 BD-DhUET
008 931105s1994 enka b 001 0 eng
020 _a0521394309
040 _aDLC
_cDLC
_dBD-DhUET
082 0 0 _a623.6
_bTOW/1994
100 1 _aTownsend, P. D.
245 1 0 _aOptical effects of ion implantation
250 _a1st ed.
260 _aCambridge
_bCambridge University Press
_c1994
300 _axiv, 280 p.
_bill.
_c24 cm.
490 _aCambridge studies in modern optics, 13
504 _aIncludes bibliographies
650 0 _aIon implantation
700 1 _aChandler, P. J.
700 1 _aZhang, L.
942 _cGB
999 _c31333
_d31333