| 000 | 00619nam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | 31383 | ||
| 003 | BD-DhUET | ||
| 008 | 920727s1992 nyua b 001 0 eng | ||
| 020 | _a0306441462 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a623.81 _bBRO/1992 |
||
| 100 | _aBrodie, Ivor | ||
| 245 | 0 | 4 | _aPhysics of micro/nano-fabrication |
| 250 | _a1st ed. | ||
| 260 |
_aNew York _bPlenum Press _c1992 |
||
| 300 |
_axix, 650p. _bill. |
||
| 490 | _aMicrodevices physics and fabrication technologies | ||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aMicroelectronics | |
| 700 | 1 | _aMuray, Julius J. | |
| 942 | _cGB | ||
| 999 |
_c31383 _d31383 |
||